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 Spin Coater (LT-MS CB)
 ½Ã½ºÅÛ Æ¯ÀåÁ¡
 Stand Alone Type
Spin Coater, Hot Plate ÀÏüÇü
Manual Loading & Auto Process
System³»ºÎ Exhaust ¹è°ü ¼³Ä¡
5000rpmÀÇ È¸Àü (Option : 7,000rpm)
PLC Control & 7" Touch Panel
Drain Tank ¼³Ä¡
´Ù¾çÇÑ ÇüÅÂÀÇ Spin Chuck Á¦ÀÛ
 Àû¿ë ºÐ¾ß
Çб³, ¿¬±¸¼Ò, ±â¾÷ü ¿¬±¸¿ë
¹ÝµµÃ¼, LED, MEMS, ¹ÙÀÌ¿À¼ÒÀÚµî °³¹ß ¿¬±¸¿ë
 ½Ã½ºÅÛ Specification
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ITEM
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LT-MS CB150
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LT-MS CB200
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LT-MS CB300
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Substrate Size
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Max 6" Wafer
100mm Square glass
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Max 8" Wafer
150mm Square glass
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Max 12" Wafer
200mm Square glass
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Spin Motor
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AC Servo Motor
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Spin Speed
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Max 5,000
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Max 5,000
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Max 3,000
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Chuck
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Aluminum / Acetal / Peek
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Bowl Size
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280mm
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330mm
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430mm
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Controller / Display
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PLC / 7" Color touch panel
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Recipe
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20 steps 20 recipes
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Hot Plate
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Specially designed heating module, Ceramic coating plate
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Temp
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Max 380¡É (± 0.3¡É at Set Temperature)
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Option
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Auto dispense module / EBR, BSR function
Spin speed : 7,000rpm(Áß°øÃà Motor)
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