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 Spin Cleaning System (LT-SS SC)
 ½Ã½ºÅÛ Æ¯ÀåÁ¡
 Stand Alone Type
Manual Loading & Auto Process
Wafer, Glass, Mask °øÁ¤¿¡ ÀûÇÕ
Chemical Dispense¿ë Scan Arm
Aluminum Frame & PVC Covering
Spin Etching, Spin Cleaning °øÁ¤
PC, PLC Control & 7" Touch Panel
´Ù¾çÇÑ Dispense ¹æ½Ä (Nozzle type)
´Ù¾çÇÑ ÇüÅÂÀÇ Spin Chuck Á¦ÀÛ
Àû¿ë ºÐ¾ß
Çб³, ¿¬±¸¼Ò, ±â¾÷ü ¿¬±¸. Á¦Ç° »ý»ê¿ë
¹ÝµµÃ¼, LED, MEMS, ¹ÙÀÌ¿À¼ÒÀÚµî °³¹ß ¿¬±¸¿ë
Wafer, Glass, Mask, CeramicµîÀÇ Cleaning°øÁ¤
½Ã½ºÅÛ Specification
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ITEM
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LT-SS SC150
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LT-SS SC200
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LT-SS SC300
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Substrate Size
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Max 6" Wafer
100mm Square glass
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Max 8" Wafer
150mm Square glass
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Max 12" Wafer
200mm Square glass
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Spin Motor
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AC Servo Motor
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Spin Speed
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Max 5,000
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Max 5,000
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Max 3,000
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Chuck
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Aluminum / Acetal / Peek
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Dispense Arm
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In/Out : Stepping Motor, Up/Down : Cylinder or Motor
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Cup (Bowl)
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SUS or PP
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Frame & Cover
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Aluminum Profile & PVC Covering, Panel
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Chemical Supply
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Canister Tank¿¡ ÀÇÇÑ N2°¡¾Ð / PVC Tank, Magnet Pump
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Controller / Display
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PC or PLC / 15" Monitor or 7" Color touch panel
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Option
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FFU / Chemical Tank³» Temp Control
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