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 Spin Coater (LT-SS CB)
 ½Ã½ºÅÛ Æ¯ÀåÁ¡
 Stand Alone Type
Spin Coater, Hot Plate ÀÏüÇü
Manual Loading & Auto Process
Chemical Auto Dispense, Dispense Arm
5000rpmÀÇ È¸Àü (Option : 7,000rpm
°íÁ¤µµ Hot Plate Àû¿ë (Max 350µµ)
Hot Plate : Shutter, 3-Pin Up/Down±â´É
PC or PLC Control
Àú¼ÒÀ½,ÀúÁøµ¿ÀÇ ¸ÞÄ«´ÏÁò ±¸Çö
´Ù¾çÇÑ ÇüÅÂÀÇ Spin Chuck Á¦ÀÛ
Àû¿ë ºÐ¾ß
Çб³, ¿¬±¸¼Ò, ±â¾÷ü ¿¬±¸¿ë
¹ÝµµÃ¼, LED, MEMS, ¹ÙÀÌ¿À¼ÒÀÚµî °³¹ß ¿¬±¸¿ë
½Ã½ºÅÛ Specification
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ITEM
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LT-MS 150
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LT-MS 200
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LT-MS 300
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Substrate Size
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Max 6" Wafer
100mm Square glass
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Max 8" Wafer
150mm Square glass
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Max 12" Wafer
200mm Square glass
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Spin Motor
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AC Servo Motor
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Spin Speed
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Max 5,000
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Max 5,000
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Max 3,000
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Chuck
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Aluminum / Acetal / Peek
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Bowl Size
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280mm
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330mm
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430mm
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Controller / Display
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PC / 15" Monitor
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Recipe
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Time, RPM, Acc, Dispense Setting
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Hot Plate
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Hard anodized Al Plate / Lift Pin up/down / Ceramic ball
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Temp
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Max 200¡É (Option : 300¡É)
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Option
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Auto dispense module / EBR, BSR finction
Spin speed : 7,000rpm(Áß°øÃà Motor)
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