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          Bullets019.gif  Spin Coater (LT-MS DC Type)

         ½Ã½ºÅÛ Æ¯ÀåÁ¡

           Bullets023.gif Table Type (DC MotorÀû¿ë)
           
Bullets023.gif Manual Loading
           
Bullets023.gif 5000rpmÀÇ È¸Àü
           
Bullets023.gif Timer¿¡ ÀÇÇÑ 2 Step Process
           
Bullets023.gif °æÁ¦ÀûÀÎ °¡°Ý
           
Bullets023.gif ´Ù¾çÇÑ ÇüÅÂÀÇ Spin Chuck Á¦ÀÛ

        Àû¿ë ºÐ¾ß

           Bullets023.gif Çб³, ¿¬±¸¼Ò, ±â¾÷ü ¿¬±¸¿ë
           
Bullets023.gif ¹ÝµµÃ¼, LED, MEMS, ¹ÙÀÌ¿À¼ÒÀÚµî °³¹ß ¿¬±¸¿ë

        ½Ã½ºÅÛ Specification

   Spin Coater
      - LT-MS Series
      - LT-MS CB
      - LT-MS DC
      - LT-SS SC
      - LT-SS AD
      - LT-SS CB
      - LT-SS CSC

   Track System
      - LT-AS Series
      - LT-AS MLC Track
      - LT-AS (Spin Wet System)

 

 
   

ITEM

Specification

Substrate Size

Max 6" Wafer

Spin Motor

DC Motor

Spin Speed (RPM)

Max 5,000rpm

Chuck

Al 6061 / Acetal / Peek

Bowl Size

280mm

Control

Timer, Trimer

Process Step

2 Step

 
   ÁÖ¼Ò : °æ±âµµ ¼º³²½Ã ºÐ´ç±¸ ÆDZ³·Î 700 (¾ßžµ¿, ºÐ´çÅ×Å©³ëÆÄÅ© Dµ¿ 611-2È£)
   ´ëÇ¥ÀüÈ­.  031-706-0106  / Æѽº.   031-706-0107
   Copyright (c) 2013 ÁÖ)¿¤Æ¼¿¡½º All right reserved